|
Linear
Motor Features
Fast
Response
High Speed
Rapid Speed
Shift
Easy to
Maintain
High
Efficiency |
Application
Automation
Application,
Precision
Measurement System,
Semiconductor,
Manufacturing Equipment and
Laser
Processing Equipment |
|
Model |
STLD-A00-0150-1-G.5-3-3-2-00 |
STLD-A00-0300-1-G.5-3-3-2-00 |
|
Stroke
|
150mm |
300mm |
|
Positioning
Accuracy |
�2μm |
�3μm |
|
Repeatability |
�1μm |
�1μm |
|
Linearity
|
�2μm |
�3μm |
|
Planarity
|
�2μm |
�3μm |
|
Max. Speed |
0.5m/s |
0.5m/s |
|
Max.
Acceleration |
0.5G |
0.5G |
|
Max. Load |
10kg |
20kg |
|
Layout & dimension |
Click here |
Click here |
Notice: Other
specification or dimensions can be customized upon request.
|
Linear
Motor Features
Fast
Response
High Speed
Rapid Speed
Shift
Easy to
Maintain
High
Efficiency |
Application
Automation
Application,
Precision
Measurement System,
Semiconductor,
Manufacturing Equipment and
Laser
Processing Equipment |
|
Model
|
STLS-A00-0300-0300-D1-D1-G.5-3-00 |
STLS-A00-0400-0400-D1-D1-G.5-3-00 |
|
Stroke
|
300 x 300mm |
400 x 400mm |
|
Positioning
Accuracy |
�3μm |
�4μm |
|
Repeatability |
�1μm |
�2μm |
|
Linearity
|
�3μm |
�4μm |
|
Planarity
|
�3μm |
�4μm |
|
Max. Speed |
1.0m/s |
1.0m/s |
|
Max.
Acceleration |
0.5G |
0.5G |
|
Max. Load |
20kg |
20kg |
|
Layout & dimension |
Click here |
Click here |
Notice: Other
specification or dimensions can be customized upon request.
3. Linear Motor Dual-mover Platform
|
Linear
Motor Features
Fast
Response
High Speed
Rapid Speed
Shift
Easy to
Maintain
High
Efficiency |
Application
Automation
Application,
Precision
Measurement System,
Semiconductor,
Manufacturing Equipment and
Laser
Processing Equipment |
|
Model
|
STLD-A00-0460-2-G.5-3-1-2-00 |
|
Stroke
|
460mm |
|
Positioning Accuracy |
�5μm |
|
Repeatability |
�2μm |
|
Linearity |
�5μm |
|
Planarity |
�5μm |
|
Max.
Speed |
1.0m/s |
|
Max.
Acceleration |
0.5G |
|
Max.
Load |
20kg |
|
layout & dimension |
Click
here |
Notice: Other
specification or dimensions can be customized upon request.
XYZ stage
Motor-driven rotary stage
Linear motor |
